TGkine series(Magnetically Suspended with Integrated Control Unit Type)
Model：TGkine
standard：TGkine1700M ~ TGkine4200M
- Integrated controller and power supply on pump.
- No interconnect cable/cable duct nor rack-mount needed, ease of installation and system cost saving.
- Well balanced performance for a wide range of vacuum processes.
- Can be started simultaneously with backing pump in series from atmosphere, shortened initial pump down time.
- Patented design for Etching process.
- Variable rotational speed control(110 rps – 450 rps) on-the-fly.
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